Stainless Steel Manifolds in Semiconductor Fabs

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2026-05-26 07:15:12 -

Gas distribution systems in semiconductor fabs use ultra‑high purity stainless steel manifolds. These stainless steel manifolds are made from 316L VAR (vacuum arc remelted) steel. The interior of such stainless steel manifolds is electropolished to a mirror finish. A helium leak test for stainless steel manifolds must show less than 1e‑9 scc/s. Each port on these stainless steel manifolds has a...

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